MgF2 Substrate
Kev piav qhia
MgF2 yog siv los ua lub lens, prism thiab qhov rais rau wavelength ntawm 110nm mus rau 7.5μm.Nws yog cov khoom tsim nyog tshaj plaws li qhov rais rau ArF Excimer Laser, vim nws qhov kev sib kis tau zoo ntawm 193nm.Nws kuj tseem siv tau zoo li optical polarizing hauv cheeb tsam ultraviolet.
Cov khoom
| Qhov ceev (g / cm3) | 3.18 |
| Melting Point (℃) | 1255 |
| Thermal conductivity | 0.3 Wm-1K-1 at 300K |
| Thermal Expansion | 13.7 x 10-6 / ℃ parallel c-axis 8.9 x 10-6 / ℃ perpendicular c-axis |
| Knoop Hardness | 415 nrog 100g indenter (kg / mm2) |
| Tshwj xeeb kub muaj peev xwm | 1003 J / (kg.k) tus nqi |
| Dielectric tsis tu ncua | 1.87 ntawm 1MHz parallel c-axis 1.45 ntawm 1MHz perpendicular c-axis |
| Cov Hluas Modulus (E) | 138.5 TSI |
| Shear Modulus (G) | 54.66 gvp |
| Cov Modulus (K) | 101.32 Nws |
| Elastic Coefficient | C11 = 164;C12 = 53;C44 = 33.7 C13 = 63;C66 = 96 |
| Pom Elastic Limit | 49.6 MPa (7200 psi) |
| Poisson Ratio | 0.276 ib |
MgF2 Substrate txhais
MgF2 substrate yog hais txog lub substrate ua los ntawm magnesium fluoride (MgF2) siv lead ua khoom.MgF2 yog ib qho inorganic compound uas muaj magnesium (Mg) thiab fluorine (F).
MgF2 substrates muaj ob peb yam tseem ceeb uas ua rau lawv nrov nyob rau hauv ntau yam kev siv, tshwj xeeb tshaj yog nyob rau hauv lub teb ntawm optics thiab nyias zaj duab xis deposition:
1. High transparency: MgF2 muaj cov pob tshab zoo heev nyob rau hauv ultraviolet (UV), pom thiab infrared (IR) cheeb tsam ntawm electromagnetic spectrum.Nws muaj kev sib kis dav dav los ntawm ultraviolet ntawm 115 nm mus rau infrared ntawm txog 7,500 nm.
2. Tsawg qhov taw qhia ntawm refraction: MgF2 muaj qhov ntsuas qis ntawm refraction, uas ua rau nws yog ib qho khoom siv zoo tshaj plaws rau AR txheej thiab optics, vim nws txo qis qhov tsis xav tau kev xav thiab txhim kho lub teeb kis tau tus mob.
3. Tsawg absorption: MgF2 nthuav tawm qhov nqus tsawg hauv cov cheeb tsam ultraviolet thiab pom spectral.Cov cuab yeej no ua rau nws muaj txiaj ntsig zoo hauv cov ntawv thov uas xav tau qhov pom tseeb pom tseeb, xws li lo ntsiab muag, prisms, thiab qhov rais rau ultraviolet lossis pom kab teeb.
4. Chemical stability: MgF2 yog tshuaj ruaj khov, tiv taus ntau yam tshuaj, thiab tswj nws cov khoom kho qhov muag thiab lub cev nyob rau hauv ntau yam ntawm ib puag ncig.
5. Thermal stability: MgF2 muaj lub siab melting point thiab muaj peev xwm tiv taus kub ua hauj lwm yam tsis muaj degradation tseem ceeb.
MgF2 substrates feem ntau yog siv rau hauv cov txheej txheem kho qhov muag, txheej txheej txheej txheej txheej txheej txheej, thiab cov qhov rai kho qhov muag lossis lo ntsiab muag hauv ntau yam khoom siv thiab tshuab.Lawv tuaj yeem ua cov txheej txheem tsis zoo lossis cov qauv rau kev loj hlob ntawm lwm cov yeeb yaj kiab nyias, xws li cov khoom siv semiconductor lossis cov xim hlau.
Cov substrates no feem ntau yog tsim los siv cov tswv yim xws li vapor deposition los yog lub cev vapor thauj txoj kev, qhov twg MgF2 cov ntaub ntawv yog tso rau ntawm ib tug haum substrate khoom los yog zus raws li ib tug siv lead ua.Nyob ntawm daim ntawv thov yuav tsum tau, substrates yuav ua tau nyob rau hauv daim ntawv ntawm wafers, daim hlau, los yog kev cai duab.
